Electrically Tunable Bulk Acoustic Filters with Induced Piezoelectric Effect in BSTO Film

被引：0
|
作者：
Turalchuk, Pavel [1 ]
Vendik, Irina [1 ]
Vendik, Orest [1 ]
Berge, John [2 ]
机构：
[1] St Petersburg Electrotech Univ, Dept Microelect & Radio Engn, Microwave Microelect Lab, 5 Prof Popov Str, St Petersburg 197376, Russia
[2] Chalmers Univ Technol, Dept Microtechnol & Nanosci, SE-41296 Gothenburg, Sweden
来源：
EUWIT: 2008 EUROPEAN WIRELESS TECHNOLOGY CONFERENCE | 2008年
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中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
In this paper we discuss a potential realizability of a tunable bulk acoustic filter based on BSTO film for microwave applications. The estimation of characteristics of the tunable TFBAR was done by processing the experimental data obtained for the BSTO resonator using the model of the induced piezoelectric effect. The third-order tunable TFBAR filter was designed. The necessary set of the acoustic and electric parameters of the tunable ferroelectric based TFBAR was proclaimed. The 10% tunability of the TFBAR filter pass band was estimated by a simulation. The simulated characteristics were obtained taking into consideration a real structure of the BSTO based resonators (electrodes and acoustic mirror).
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页码：274 / +
页数：2
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