All-optical micromechanical chemical sensors

被引：16
|
作者：
Stievater, T. H. [1 ]
Rabinovich, W. S.
Ferraro, M. S.
Papanicolaou, N. A.
Boos, J. B.
McGill, R. A.
Stepnowski, J. L.
Houser, E. J.
机构：
[1] USN, Res Lab, Washington, DC 20375 USA
[2] William J Hughes Tech Ctr, Transportat Secur Lab, Atlantic City, NJ 08405 USA
来源：
APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 09期
关键词：
D O I：
10.1063/1.2344936
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The authors describe experimental results from micromechanical resonators coated with a chemoselective polymer that detect chemical vapors from volatile organic compounds using all-optical interrogation. The shift in the resonant frequency of the gold microbeam is read out using photothermal actuation and microcavity interferometry. Response times of less than 5 s are achieved for vapor concentrations as low as 60 ppm using optical powers of a few megawatts. (c) 2006 American Institute of Physics.
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