Highly miniaturized multilayer superconducting filter

被引：3
|
作者：
Laforge, P. D. [1 ]
Mansour, R. R. [1 ]
Yu, Ming [1 ]
机构：
[1] Univ Waterlooy, Elect & Comp Engn Dept, Waterloo, ON N2L 3G1, Canada
来源：
2006 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-5 | 2006年
关键词：
bandpass filters; coplanar waveguides; niobium; radio receivers; superconducting filters;
D O I：
10.1109/MWSYM.2006.249725
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A multilayer superconducting filter is reported for the first time in this paper. The filter employs highly miniature lumped element components embedded within four metal layers. The 150 nm thick dielectric layer between metal layers of the process allows for the realization of capacitors with high values of capacitance. A 3-pole filter has been developed, fabricated, and tested. This filter has a measured center frequency of 1.28 GHz, and is only 2.0 mm by 0.6 mm in size. The filter structure is amenable to superconductor microelectronics technology and can be integrated monolithically with a superconducting receiver on a single chip.
引用
收藏
页码：685 / 688
页数：4
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