Air-gap-type TFBAR-based filter topologies

被引：8
|
作者：
Kim, KW [1 ]
Kim, GY [1 ]
Yook, JG [1 ]
Park, HK [1 ]
机构：
[1] Yonsei Univ, Dept Elect & Elect Engn, Seoul 120749, South Korea
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2002年 / 34卷 / 05期
关键词：
bandpass; filter; TFBAR; AlN; MBVD model;
D O I：
10.1002/mop.10470
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Extremely small bandpass filters with TFBARs using aluminum nitride piezoelectric material have been realized in this study. Resonator modeling has been performed based on the modified Butterworth-Van Dyke (MBVD) model from the measured frequency responses of a single resonator. The predicted filter responses are compared with measured frequency data. (C) 2002 Wiley Periodicals. Inc.
引用
收藏
页码：386 / 387
页数：2
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