Simulation-based design of a MEMS X-ray optic for X-ray astronomy

被引：0
|
作者：
Koshiishi, M.
Ezoe, Y.
Mitsuishi, I.
Mita, M.
Mitsuda, K.
Takano, T.
Maeda, R.
机构：
来源：
2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2008年
关键词：
D O I：
10.1109/OMEMS.2008.4607859
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.
引用
收藏
页码：122 / 123
页数：2
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