Exceeding the bulk modification threshold of silicon with hyper-focused infrared femtosecond laser pulses

被引:0
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作者
Chanal, Margaux [1 ]
Fedorov, Vladimir Yu [2 ,3 ]
Chambonneau, Maxime [1 ]
Clady, Raphael [1 ]
Uteza, Olivier [1 ]
Tzortzakis, Stelios [2 ,4 ,5 ]
Grojo, David [1 ]
机构
[1] Aix Marseille Univ, CNRS, LP3, UMR 7341, F-13288 Marseille, France
[2] Texas A&M Univ Qatar, Sci Program, POB 23874, Doha, Qatar
[3] Russian Acad Sci, PN Lebedev Phys Inst, 53 Leninskiy Prospekt, Moscow 119991, Russia
[4] Fdn Res & Technol Hellas FORTH, POB 1527, GR-71110 Iraklion, Greece
[5] Univ Crete, Mat Sci & Technol Dept, Iraklion 71003, Greece
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TRANSPARENT MATERIALS;
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页数:1
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