Amplitudes and shapes of Fabry-Perot resonances in laser interference thermometry of semiconductors and dielectrics

被引:0
|
作者
Magunov, AN [1 ]
Merkulov, SV [1 ]
机构
[1] Russian Acad Sci, Inst Microelect, Yaroslavl 150007, Russia
基金
俄罗斯基础研究基金会;
关键词
D O I
10.1134/1.1259597
中图分类号
O59 [应用物理学];
学科分类号
摘要
The possibilities of the most sensitive method of laser thermometry of transparent and semitransparent plates have been determined for the varying optical properties of the surface and the conditions of the surface probing. The contrast of light interference in the plates was studied as a function of the diameter of the probing laser beam, the angle of the light incidence onto the surface and its roughness, and the presence of antireflecting and reflecting films on the surface. It is established that the contrast also depends on the transverse temperature gradient in the plate. The measurements were made on silicon single crystals and the optical K-8 glass. (C) 2000 MAIK "Nauka/Interperiodica".
引用
收藏
页码:199 / 204
页数:6
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