On the electrostatic control achieved in transistors based on multilayered MoS2: A first-principles study

被引:20
|
作者
Lu, Anh Khoa Augustin [1 ,2 ]
Pourtois, Geoffrey [2 ,3 ]
Luisier, Mathieu [4 ]
Radu, Iuliana P. [2 ]
Houssa, Michel [1 ]
机构
[1] Univ Leuven, Dept Phys & Astron, Semicond Phys Lab, Celestijnenlaan 200 D, B-3001 Leuven, Belgium
[2] IMEC, 75 Kapeldreef, B-3001 Leuven, Belgium
[3] Univ Antwerp, Plasmant Res Grp, Dept Chem, B-2610 Antwerp, Belgium
[4] ETH, Integrated Syst Lab, CH-8092 Zurich, Switzerland
关键词
D O I
10.1063/1.4974960
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this work, the electrostatic control in metal-oxide-semiconductor field-effect transistors based on MoS2 is studied, with respect to the number of MoS2 layers in the channel and to the equivalent oxide thickness of the gate dielectric, using first-principles calculations combined with a quantum transport formalism. Our simulations show that a compromise exists between the drive current and the electrostatic control on the channel. When increasing the number of MoS2 layers, a degradation of the device performances in terms of subthreshold swing and OFF currents arises due to the screening of the MoS2 layers constituting the transistor channel. Published by AIP Publishing.
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页数:6
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