High performance InAs quantum dot lasers on silicon substrates by low temperature Pd-GaAs wafer bonding

被引:12
|
作者
Wang, Zihao [1 ]
Yao, Ruizhe [2 ]
Preble, Stefan F. [1 ]
Lee, Chi-Sen [2 ]
Lester, Luke F. [3 ]
Guo, Wei [2 ]
机构
[1] Rochester Inst Technol, Microsyst Engn, Rochester, NY 14623 USA
[2] Univ Massachusetts Lowell, Phys & Appl Phys Dept, Lowell, MA 01854 USA
[3] Virginia Polytech Inst & State Univ, Bradley Dept Elect & Comp Engn, Blacksburg, VA 24061 USA
基金
美国国家科学基金会;
关键词
WAVE-GUIDES; III-V; SEMICONDUCTORS; DEVICES;
D O I
10.1063/1.4938205
中图分类号
O59 [应用物理学];
学科分类号
摘要
InAs quantum dot (QD) laser heterostructures have been grown by molecular beam epitaxy system on GaAs substrates, and then transferred to silicon substrates by a low temperature (250 degrees C) Pd-mediated wafer bonding process. A low interfacial resistivity of only 0.2 Omega cm(2) formed during the bonding process is characterized by the current-voltage measurements. The InAs QD lasers on Si exhibit comparable characteristics to state-of-the-art QD lasers on silicon substrates, where the threshold current density J(th) and differential quantum efficiency eta(d) of 240 A/cm(2) and 23.9%, respectively, at room temperature are obtained with laser bars of cavity length and waveguide ridge of 1.5 mm and 5 mu m, respectively. The InAs QD lasers also show operation up to 100 degrees C with a threshold current density J(th) and differential quantum efficiency eta(d) of 950 A/cm(2) and 9.3%, respectively. The temperature coefficient T-0 of 69K from 60 to 100 degrees C is characterized from the temperature dependent Jth measurements. (C) 2015 AIP Publishing LLC.
引用
收藏
页数:4
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