Fully vertical-coupling and one-step etching subwavelength binary blazed grating coupler

被引：0
|
作者：
Yang, Junbo [1 ,2 ]
Wu, Wenjun [1 ]
Huang, Jie [1 ]
Chen, Dingbo [1 ]
Zhang, Jingjing [1 ]
机构：
[1] Natl Univ Def Technol, Ctr Mat Sci, Changsha 410073, Hunan, Peoples R China
[2] Peking Univ, State Key Lab Adv Opt Commun Syst & Networks, Beijing 100871, Peoples R China
来源：
INTERNATIONAL CONFERENCE ON OPTOELECTRONICS AND MICROELECTRONICS TECHNOLOGY AND APPLICATION | 2017年 / 10244卷
基金：
中国国家自然科学基金;
关键词：
Grating coupler; Coupling efficiency; Rigorous coupled-wave analysis; Finite difference time domain; INSULATOR WAVE-GUIDES; HIGH-EFFICIENCY;
D O I：
10.1117/12.2258710
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We proposed a fully vertical-coupling and one-step etching subwavelength binary blazed grating (BBG) coupler with coupling efficiencies exceeding 80% at a wavelength of 1.55 mu m. Based on reflector grating and Bragg bottom reflector layer, the coupling efficiency gets its maximum 90% when lambda is equal to 1.535 mu m with the 1 dB wavelength bandwidth is around 35nm. The BBG is formed with multiple rectangular pillars having different widths and uniform height, which is a kind of binary version of the triangular tooth shape of the blazed grating and can be easily fabricated by only one etching step. It is CMOS compatible and available for mass production.
引用
收藏
页数：8
相关论文
共 18 条
  • [1] High Efficient Subwavelength Binary Blazed Grating Beam Splitter via Vertical Coupling
    Yang, Junbo
    Zhou, Zhiping
    Zhou, Wei
    Zhang, Xucao
    Jia, Honghui
    [J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2011, 23 (13) : 896 - 898
  • [2] Efficient and perfectly vertical binary blazed grating coupler with a slit
    Ji, Zhe
    Fu, Shi-ru
    Li, Dong
    Yan, Ying-zhan
    Yan, Lin-tong
    Jia, Da-gong
    [J]. OPTICAL ENGINEERING, 2023, 62 (09)
  • [3] High-performance and compact binary blazed grating coupler based on an asymmetric subgrating structure and vertical coupling
    Yang, Junbo
    Zhou, Zhiping
    Jia, Honghui
    Zhang, Xueao
    Qin, ShiQiao
    [J]. OPTICS LETTERS, 2011, 36 (14) : 2614 - 2616
  • [4] High Efficient Vertical Binary Blazed Grating Coupler for Chip Level Optical Interconnections
    Yu, Li
    Liu, Lu
    Zhou, Zhiping
    Wang, Xingjun
    [J]. 2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2014,
  • [5] High efficiency binary blazed grating coupler for perfectly-vertical and near-vertical coupling in chip level optical interconnections
    Yu, Li
    Liu, Lu
    Zhou, Zhiping
    Wang, Xingjun
    [J]. OPTICS COMMUNICATIONS, 2015, 355 : 161 - 166
  • [6] Symmetrical fully-etched and chirped beam splitter based on a subwavelength binary blazed grating
    Zhou Wei
    Zhang Hua-liang
    Yang Jun-bo
    Yang Jun-cai
    [J]. OPTOELECTRONICS LETTERS, 2012, 8 (03) : 182 - 185
  • [7] Symmetrical fully-etched and chirped beam splitter based on a subwavelength binary blazed grating
    周唯
    张华良
    杨俊波
    杨俊才
    [J]. Optoelectronics Letters, 2012, 8 (03) : 182 - 185
  • [8] Symmetrical fully-etched and chirped beam splitter based on a subwavelength binary blazed grating
    Wei Zhou
    Hua-liang Zhang
    Jun-bo Yang
    Jun-cai Yang
    [J]. Optoelectronics Letters, 2012, 8 (3) : 182 - 185
  • [9] A four-port vertical-coupling optical interface based on two-dimensional grating coupler
    Zhang, Zan
    Zhang, Zanyun
    Huan, Beiju
    Cheng, Chuantong
    Gao, Tianxi
    Hu, Xiaochuan
    Zhang, Lin
    Chen, Hongda
    [J]. OPTOELECTRONIC DEVICES AND INTEGRATION VI, 2016, 10019
  • [10] InGaN directional coupler made with a one-step etching technique
    Gao, Xumin
    Yuan, Jialei
    Yang, Yongchao
    Zhang, Shuai
    Shi, Zheng
    Li, Xin
    Wang, Yongjin
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2017, 32 (06)
12