Three-dimensional space charge cartographies by FLIMM in electron irradiated polymers

被引:15
|
作者
Petre, A. [1 ]
Pham, C. -D. [1 ]
Marty-Dessus, D. [1 ]
Berquez, L. [1 ]
机构
[1] Univ Toulouse 3, Lab Plasma & Convers Energie, F-31062 Toulouse, France
关键词
FLIMM; PTFE; e-beam irradiation; three-dimensional cartography; INTENSITY-MODULATION METHOD; THERMAL-WAVE; DISTRIBUTIONS; POLARIZATION;
D O I
10.1016/j.elstat.2008.12.011
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High resolution three-dimensional space charge cartographies obtained on 50 pm PTFE samples by using FLIMM technique are presented in this article. Samples were irradiated by a 30 keV electron beam. Charges were injected according to the grid pattern put on the sample during irradiation. A new measurement strategy associated with a new set-up leads to an improvement in measurements accuracy and precision. With this new strategy, measurements were performed rapidly, at a chosen depth and with a low lateral resolution in order to map the space charge profile in the whole sample and to choose a study area. After selecting an interesting area, space charge cartographies were carried out with a very high lateral resolution of about 1 mu m. The irradiated zones according to the grid pattern were well reconstructed and the injection depth did not exceed 4 mu m. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:430 / 434
页数:5
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