Humidity sensing property of LiCl/SiO2-Al2O3 nano-composite film

被引：0

作者：

Zhao, P ^{[1
]}

Zhai, JW

Zhang, LY

Yao, X

机构：

[1] Xian Jiao Tong Univ, Elect Mat Res Lab, Xian 710049, Peoples R China

[2] Tongji Univ, Funct Mat Res Lab, Shanghai 200092, Peoples R China

来源：

JOURNAL OF INORGANIC MATERIALS | 1999年 / 14卷 / 06期

关键词：

lithium chlorinate; thin film; nano-composite; humidity sensor;

D O I：

暂无

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

LiCl/SiO2-Al2O3 films with good humidity sensing properties were prepared by sol-gel process. The him structure was investigated by using XRD and AFM. The results indicated that the impedance variety of the him with nano-phase separation structure was more than 3 order of magnitude, and there was a better linear relationship between logarithmic impedance and relative humidity; the moisture absorption response and dehydration response of this film were less than 30s and 60s respectively.

引用

页码：995 / 999

页数：5