Design and Optimization of a Vibrational MEMS-Based Energy Harvester

被引：1

作者：

Holguin, Eduardo ^{[1
,2
]}

Trojman, Lionel ^{[1
,2
]}

Procel, Luis Miguel ^{[2
]}

Brenes, Alexis ^{[3
]}

Vladimirescu, Andrei ^{[4
]}

机构：

[1] ISEP Inst Super Elect Paris, 10 Rue Vanves, F-92130 Issy Les Moulineaux, France

[2] Univ San Francisco Quito USFQ, Inst Micro & Nanoelect IMNE, Quito, Ecuador

[3] Univ Paris Sud, Ctr Nanosci & Nanotechnol, CNRS, Paris, France

[4] Univ Calif Berkeley, Berkeley, CA 94720 USA

来源：

PRIME 2022: 17TH INTERNATIONAL CONFERENCE ON PHD RESEARCH IN MICROELECTRONICS AND ELECTRONICS | 2022年

关键词：

Acceleration; VEH; MEMS;

D O I：

10.1109/PRIME55000.2022.9816839

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the design of a Vibrational Energy Harvester (VEH) based on a microelectromechanical system (MEMS) with gap-closing electrostatic resonator. The electrical signal generated by the MEMS is rectified with a charge pump circuit based on the Greinacher Voltage Doubler (GVD). The performance of the VEH system is analyzed and an optimal resistive load is calculated to maximize harvested power and frequency range of operation. The rectifier was designed in a 0.18 mu m technology. The VEH system was validated with Cadence Virtuoso. The designed energy harvester generates a DC output power of 90.06nW at 9.95V under an applied vibration with an acceleration amplitude of 0.33m/s<^>2 at a frequency of 53Hz.

引用

页码：121 / 124

页数：4

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