Micro electro-mechanical systems (MEMS) in precision engineering

In 1959, the American physicist and subsequent Nobel laureat Richard Feynman disclosed us a miniature world, the ,,Feynman World". He challenged us to build components of smaller and smaller dimensions by taking advantage of new technologies. Ultimately we would reach the realm of atoms and would learn how to manipulate them, A wealth of new physical effects would be the benefit of such an endeavour. Present day's micro- and nanomachining techniques are the answer to Feynman's challenge. They use processes advanced by microelectronics to fabricate thousands or even ten thousands of micro devices on a single wafer. Through the ongoing development of miniaturized devices, micro technology is about to permanently influence precision engineering.