Surface and pseudo surface acoustic waves in langatate: Predictions and measurements

被引:25
|
作者
da Cunha, MP [1 ]
Malocha, DC
Adler, EL
Casey, KJ
机构
[1] Univ Maine, Dept Elect & Comp Engn, Orono, ME 04469 USA
[2] Univ Cent Florida, Sch Elect & Comp Engn, Orlando, FL 32816 USA
[3] McGill Univ, Dept Elect & Comp Engn, Montreal, PQ, Canada
关键词
D O I
10.1109/TUFFC.2002.1041546
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Langatate (LGT, La3Ga5.5Ta0.5O14) is a recent addition to materials of the trigonal crystal class 32, which is the same crystal class, as quartz, langasite, langanite, and gallium phosphate. Langatate has several attractive acoustical properties, in particular: a measured bulk acoustic wave (BAW) resonator quality factor frequency product (Qf) of 16 million, comparable to that of AT cut quartz; high-piezoelectric coupling orientations, up to 0.5% for surface acoustic waves (SAWs), about five times larger than that of ST-X quartz; low power flow angle orientations in the vicinity of high coupling orientations; phase velocities about 20% smaller than those of ST-X quartz, facilitating the production of smaller, lower frequency devices; the existence of pseudo SAW modes for higher frequency applications. In this paper SAW contour plots of the phase velocity (v(P)), the electromechanical coupling coefficient (K-2), the temperature coefficient of delay (TCD), and the power flow angle (PFA), are given showing the orientations in space in which high coupling is obtained, with the corresponding TCD, PFA, and v(P) characteristics for these orientations. This work reports experimental results on the SAW temperature fractional frequency variation (Deltaf/fo) and the TCD for several LGT orientations on the plane with Euler angles: (0degrees, 132degrees, psi). The temperature behavior has been measured directly on SAW wafers from 10 to 200degreesC, and the results are compared with numerical predictions using our recently measured temperature coefficients for LGT material constants. This research also has uncovered temperature compensated orientations, which we have experimentally verified with parabolic behavior, turnover temperatures in the 130 to 160degreesC range, and Deltaf/fo within 1000 ppm variation from 10 to 260degreesC, appropriate for higher temperature device applications. Regarding the pseudo surface acoustic waves (PSAWs), results of calculations are presented for both the PSAW and the high velocity PSAW (HVPSAW) for some selected, rotated cuts. This study shows that propagation losses for the PSAWs of about 0.01 dB/wavelength, and phase velocities approximately 20% higher than that of the SAW, exist along specific orientations for the PSAW, thus showing the potential for somewhat higher frequency SAW device applications on this material, if required.
引用
收藏
页码:1291 / 1299
页数:9
相关论文
共 50 条
  • [1] Surface and pseudo surface acoustic waves in langatate
    da Cunha, MP
    Adler, EL
    Malocha, DC
    [J]. 1999 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 1999, : 169 - 172
  • [2] Pseudo Surface Acoustic Waves in α-Quartz
    Taziev, R. M.
    [J]. 2013 INTERNATIONAL SIBERIAN CONFERENCE ON CONTROL AND COMMUNICATIONS (SIBCON), 2013,
  • [3] New optimal orientations for surface acoustic waves in langasite, langanite, and langatate piezoelectric crystals
    Dvoesherstov, MY
    Petrov, SG
    Cherednik, VI
    Chirimanov, AP
    [J]. TECHNICAL PHYSICS, 2002, 47 (08) : 1032 - 1037
  • [4] New optimal orientations for surface acoustic waves in langasite, langanite, and langatate piezoelectric crystals
    M. Yu. Dvoesherstov
    S. G. Petrov
    V. I. Cherednik
    A. P. Chirimanov
    [J]. Technical Physics, 2002, 47 : 1032 - 1037
  • [5] MEASUREMENTS ON SURFACE ACOUSTIC WAVES IN PHOTOCONDUCTING CADMIUM SULFIDE
    KUHN, L
    [J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1970, 58 (09): : 1380 - &
  • [6] Surface and pseudo-surface acoustic waves piezoelectrically excited in diamond-based structures
    Glushkov, Evgeny
    Glushkova, Natalia
    Zhang, Chuanzeng
    [J]. JOURNAL OF APPLIED PHYSICS, 2012, 112 (06)
  • [7] MEASUREMENTS OF ACOUSTIC SURFACE-WAVES BY MEANS OF AN ACOUSTOOPTIC PROBE
    MILLER, RL
    [J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1974, 55 : S38 - S38
  • [8] Least action principle for the estimation of the slowness and the attenuation of pseudo surface acoustic waves
    Laude, V
    Wilm, M
    Ballandras, S
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 93 (12) : 10084 - 10088
  • [9] Quasi-longitudinal pseudo-surface acoustic waves on Lithium Tantalate
    Cherednick, VI
    Dvoesherstov, MY
    Bhattacharjee, K
    [J]. 2004 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-3, 2004, : 1549 - 1552
  • [10] INFLUENCE OF SURFACE ROUGHNESS ON SURFACE ACOUSTIC WAVES
    Chen, Long
    Li, Yang
    [J]. PROCEEDINGS OF THE 2020 15TH SYMPOSIUM ON PIEZOELECTRCITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS (SPAWDA), 2021, : 399 - 403