Development and application of glancing incident X-ray fluorescence spectrometry using parallel polycapillary X-ray lens

被引：8

作者：

Yang, Jun ^{[1
]}

Zhao, Dandan ^{[1
]}

Xu, Qing ^{[2
]}

Ding, Xunliang ^{[1
]}

机构：

[1] Beijing Normal Univ, Beijing Radiat Ctr, Inst Low Energy Nucl Phys, Beijing 100875, Peoples R China

[2] Chinese Acad Sci, Inst High Energy Phys, Beijing 100875, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 13-14期

关键词：

Total reflection X-ray fluorescence; Parallel polycapillary X-ray lens; Film analysis; LAYER ANALYSIS; REFLECTION; SURFACE; OPTICS; FILMS;

D O I：

10.1016/j.apsusc.2008.09.079

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A new glancing incident X-ray fluorescence (GIXRF) spectrometer using parallel polycapillary X-ray lens has been developed. Integrated with a Zr filter and slits, a highly collimated and monochromatic X-ray beam has been achieved. This method eliminated the monochromator used in the conventional GIXRF method. Moreover the parallel X-ray lens increased the acceptance solid angle and hence increases intensities of the excitation spectrum. In this paper, this method has been applied in analysis of single crystal and film sample. (C) 2009 Published by Elsevier B.V.

引用

页码：6439 / 6442

页数：4

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