Metal based grating coupler on a thin-film lithium niobate waveguide

被引:26
|
作者
Ruan, Ziliang [1 ]
Hu, Jinyao [2 ]
Xue, Yu [1 ]
Liu, Jie [2 ]
Chen, Bin [1 ]
Wang, Jingyi [2 ]
Chen, Kaixuan [2 ]
Chen, Pengxin [2 ]
Liu, Liu [1 ]
机构
[1] Zhejiang Univ, Coll Opt Sci & Engn, Int Res Ctr Adv Photon, State Key Lab Modern Opt Instrumentat,Ctr Opt & E, East Building 4, Zijingang Campus, Hangzhou 310058, Peoples R China
[2] South China Normal Univ, South China Acad Adv Optoelect, Guangdong Prov Key Lab Opt Informat Mat & Technol, Higher Educ Megactr,Ctr Opt & Electromagnet Res, Sci Bldg 5, Guangzhou 510006, Peoples R China
来源
OPTICS EXPRESS | 2020年 / 28卷 / 24期
基金
中国国家自然科学基金;
关键词
SILICON; EFFICIENCY;
D O I
10.1364/OE.411284
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Thin-film lithium niobate (LN) has been proved to be an excellent platform for building compact active and nonlinear photonic components on a chip. The coupling of a sub-micron sized LN waveguide and a single-mode fiber remains as one challenging issue. An efficient grating coupler made of Au stripes on an LN ridge waveguide is demonstrated here. The fabrication of the grating is convenient, using just a standard lift-off process of metal films. The peak coupling efficiency of an optimized structure reaches 50.4%, i.e., -3 dB coupling loss, at 1.55 mu m wavelength for the fundamental transverse-electrical mode, where the 1-dB coupling bandwidth is 58 nm. Experimentally, fabricated devices, with buried oxide layer thicknesses slightly off the optimal values, exhibit coupling efficiencies of 43.8% and 33.7% for 400 nm and 600 nm thick LN layers. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:35615 / 35621
页数:7
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