Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch

被引：17

作者：

Sharma, Ashish Kumar ^{[1
]}

Gupta, Navneet ^{[1
]}

机构：

[1] Birla Inst Technol & Sci, Dept Elect & Elect Engn, Pilani 333031, Rajasthan, India

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2014年 / 20卷 / 03期

关键词：

Serpentine; Spring Constant; Actuation Voltage; Span Beam; Beam Segment;

D O I：

10.1007/s00542-013-1930-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents an attempt to reduce the actuation voltage of capacitive RF-MEMS switch by introducing the concept of non-uniform serpentine flexure suspensions. The spring constant of non-uniform serpentine flexure with different meander sections have been equated by analytical expression and verified with finite element method (FEM). FEM analysis indicate actuation voltage as low as 5 V with single meander section for the proposed non-uniform serpentine spring design, which is reasonably low as compared to uniform serpentine spring with same span beam length.

引用

页码：413 / 418

页数：6

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