EVELOPMENT OF CAPACITIVE MEMS MICROPHONE BASED ON SLIT-EDGE FOR HIGH SIGNAL-TO-NOISE RATIO

被引：0
|
作者：
Yoo, Ilseon [1 ]
Sim, Jaesam [1 ]
Yang, Sanghyeok [1 ]
Kim, Hyunsoo [1 ]
机构：
[1] Hyundai Motor Co, Seoul, South Korea
来源：
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2018年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a capacitive MEMS microphone has been developed by using a slit membrane. This microphone is composed of a membrane with slit structures, a back-plate, a back-chamber (determining an acoustic inlet), and an air gap in-between the membrane and the back-plate. As a sound is entered on the microphone, the slit membrane is oscillating whereas the back-plate is fixed. As a result, the microphone detects a sound level by a capacitance variance between the back-plate and the membrane. The membrane is flexible because of the slit structure, and thus the MEMS microphone shows high sensitivity.
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页码：1072 / 1075
页数：4
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