Research on Collaborative Optimization of Green Manufacturing in Semiconductor Wafer Distributed Heterogeneous Factory

被引:17
|
作者
Dong, Jun [1 ,2 ]
Ye, Chunming [1 ]
机构
[1] Univ Shanghai Sci & Technol, Business Sch, Shanghai 200093, Peoples R China
[2] Henan Inst Technol, Xinxiang 453000, Henan, Peoples R China
来源
APPLIED SCIENCES-BASEL | 2019年 / 9卷 / 14期
基金
中国国家自然科学基金;
关键词
semiconductor wafer fabrication; distributed; heterogeneous factory; collaborative optimization; SHOP SCHEDULING PROBLEM; WOLF OPTIMIZER; GENETIC ALGORITHM; CARBON FOOTPRINT; EFFICIENCY; CRITERION; TIME;
D O I
10.3390/app9142879
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Production scheduling of semiconductor wafer manufacturing is a challenging research topic in the field of industrial engineering. Based on this, the green manufacturing collaborative optimization problem of the semiconductor wafer distributed heterogeneous factory is first proposed, which is also a typical NP-hard problem with practical application value and significance. To solve this problem, it is very important to find an effective algorithm for rational allocation of jobs among various factories and the production scheduling of allocated jobs within each factory, so as to realize the collaborative optimization of the manufacturing process. In this paper, a scheduling model for green manufacturing collaborative optimization of the semiconductor wafer distributed heterogeneous factory is constructed. By designing a new learning strategy of initial population and leadership level, designing a new search strategy of the predatory behavior for the grey wolf algorithm, which is a new swarm intelligence optimization algorithm proposed in recent years, the diversity of the population is expanded and the local optimum of the algorithm is avoided. In the experimental stage, two factories' and three factories' test cases are generated, respectively. The effectiveness and feasibility of the algorithm proposed in this paper are verified through the comparative study with the improved Grey Wolf Algorithms-MODGWO, MOGWO, the fast and elitist multi-objective genetic algorithm-NSGA-II.
引用
收藏
页数:25
相关论文
共 27 条
  • [1] Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer
    Dong, Jun
    Ye, Chunming
    [J]. MATHEMATICAL PROBLEMS IN ENGINEERING, 2020, 2020
  • [2] Research on distributed collaborative optimization technology
    Xue, CJ
    Qiu, QY
    Feng, P
    Wu, JW
    [J]. DCABES 2002, PROCEEDING, 2002, : 138 - 143
  • [3] Multi-factory optimization enables kit reconfiguration in semiconductor manufacturing
    Zhang, MT
    Niu, S
    Mai, M
    Li, Q
    [J]. 2005 IEEE INTERNATIONAL CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING (CASE), 2005, : 105 - 112
  • [4] Research of collaborative markup under distributed heterogeneous environment
    Hao, Yongping
    Sun, Guoqiang
    Zeng, Pengfei
    [J]. 2007 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS I-V, CONFERENCE PROCEEDINGS, 2007, : 2226 - 2230
  • [5] A systematic estimation model for fraction nonconforming of a wafer in semiconductor manufacturing research
    Lin, Jun-Shuw
    [J]. APPLIED SOFT COMPUTING, 2012, 12 (06) : 1733 - 1740
  • [6] Research on Motion Control and Wafer-Centering Algorithm of Wafer-Handling Robot in Semiconductor Manufacturing
    Han, Bing-Yuan
    Zhao, Bin
    Sun, Ruo-Huai
    [J]. SENSORS, 2023, 23 (20)
  • [7] Research in Synchronization Optimization of the Distributed Heterogeneous Database Data
    Zhang, ZhenYou
    Liu, LiHong
    Zhang, Rui
    [J]. ADVANCES IN COMPUTER SCIENCE, ENVIRONMENT, ECOINFORMATICS, AND EDUCATION, PT 5, 2011, 218 : 65 - +
  • [8] Research on the Integration and Query Optimization for the Distributed Heterogeneous Database
    Zhang Zhenyou
    Zhang Jingjing
    Liu Shu
    Cao Zhi
    [J]. 2011 INTERNATIONAL CONFERENCE ON COMPUTER SCIENCE AND NETWORK TECHNOLOGY (ICCSNT), VOLS 1-4, 2012, : 1533 - 1536
  • [9] Enhancing the Mid-term Competitiveness of a Semiconductor Manufacturing Factory through Collaborative Yield Learning Planning
    Wang, Yi-Chi
    Chen, Toly
    Li, Kun-Tai
    [J]. ADVANCED MANUFACTURE: FOCUSING ON NEW AND EMERGING TECHNOLOGIES, 2008, 594 : 475 - +
  • [10] Remote collaborative process optimization in research and design of industrial manufacturing
    Wang S.
    Li Q.
    [J]. Autonomous Intelligent Systems, 2023, 3 (01):