A differential resonant micro accelerometer for out-of-plane measurements

被引：13

作者：

Caspani, Alessandro ^{[1
]}

Comi, Claudia ^{[1
]}

Corigliano, Alberto ^{[1
]}

Langfelder, Giacomo ^{[2
]}

Zega, Valentina ^{[1
]}

Zerbini, Sarah ^{[3
]}

机构：

[1] Politecn Milan, Dept Civil & Environm Engn, Piazza Leonardo da Vinci 32, I-20133 Milan, Italy

[2] Politecn Milan, Dept Elect Informat Technol & Bioengn, I-20133 Milan, Italy

[3] STMicroelectronics, AMS Div, I-20010 Milan, Italy

来源：

28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) | 2014年 / 87卷

关键词：

MEMS; accelerometer; torsional resonators;

D O I：

10.1016/j.proeng.2014.11.569

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper reports the theoretical and experimental characterization of a new z-axis silicon resonant micro accelerometer fabricated by the THELMA (c) surface micromachining technique, characterized by differential sensing and very small dimensions. The working principle of this device is based on the variation of the electrostatic stiffness of two torsional resonators. This work is a prosecution of the research on resonant accelerometers published in [1,2]. (c) 2014 The Authors. Published by Elsevier Ltd.

引用

页码：640 / 643

页数：4

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