Current developments on optical asphere and freeform metrology

被引：2
|
作者：
Muehlig, S. [1 ]
Siepmann, J. [1 ]
Lotz, M. [1 ]
Wiegmann, A. [1 ,3 ]
Blobel, G. [3 ]
Mika, S. [1 ]
Beutler, A. [2 ]
Nehse, U. [1 ]
机构：
[1] Mahr GmbH, D-07745 Jena, Germany
[2] Mahr GmbH, D-37073 Gottingen, Germany
[3] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany
来源：
OPTICAL SYSTEMS DESIGN 2015: OPTICAL FABRICATION, TESTING, AND METROLOGY V | 2015年 / 9628卷
关键词：
Twyman-Green interferometer; White light interferometry; High accuracy cylinder coordinate measuring machine; Tilted wave interferometer; Asphere and freeform measurement;
D O I：
10.1117/12.2191247
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Two techniques for the measurement of aspheres as well as freeforms are presented. The first method, the tilted wave interferometer, is a full aperture interferometric measurement method without any moving parts during the measurement. The second method applies an optical single point sensor in conjunction with two translational and one rotational axes. Both techniques are compared by measuring a selected asphere and a special freeform surface. Differences between both measurement principles are discussed.
引用
收藏
页数：7
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