Flexible platinum nanoparticle strain sensors

被引：0
|
作者：
Skotadis, E. [1 ]
Mousadakos, D. [1 ]
Tanner, J. [1 ]
Tsoukalas, D. [1 ]
Broutas, P. [2 ]
机构：
[1] Natl Tech Univ Athens, Dept Appl Sci, Heroon Politechniou 9, Athens 15780, Greece
[2] NCSR Demokritos, Inst Microelct, Athens, Greece
来源：
2013 PROCEEDINGS OF THE EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE (ESSDERC) | 2013年
关键词：
PRINTING TECHNIQUES; TRANSISTORS; GAUGE;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Using a modified magnetron sputtering technique, platinum nanoparticles having a mean diameter of 4-6 nm have been deposited on flexible polyimide substrates. The polyimide substrates have been previously patterned with gold interdigitated electrodes having an inter-finger distance of 10 mu m, using conventional photo lithography and the e-gun evaporation of gold. By controlling the nanoparticle deposition time, platinum nanoparticle sensors of varying sensitivity can be produced. As a result a flexible cost effective alternative to silicon strain sensors is hereby presented.
引用
收藏
页码：354 / 357
页数：4
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