A new semi-analytical method analyzing the magnetic field in unbalanced magnetron sputtering system

被引：2
|
作者：
Han, Liang [1 ,2 ]
Zhao, YuQing [1 ]
Wang, YanWu [1 ]
机构：
[1] Xi An Jiao Tong Univ, Minist Educ, Key Lab Phys Elect & Devices, Xian 710049, Peoples R China
[2] Xidian Univ, Sch Tech Phys, Xian 710071, Peoples R China
来源：
VACUUM | 2009年 / 83卷 / 11期
关键词：
Semi-analytical method; Unbalanced magnetron sputtering; Magnetic field; SIMULATION; COATINGS;
D O I：
10.1016/j.vacuum.2009.04.040
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new method, semi-analytical method (SAM), is first applied to calculate and analyze the magnetic filed in unbalanced magnetron sputtering system, and introduced in detail. An analytic solution of the scalar magnetic potential in the system can be acquired by the SAM. Its unknown number is much less than that in the numerical method. The analytic series expression of magnetic flux density can be easily obtained directly by differentiating the scalar magnetic potential function, and it can also easily ensure the precision of solving the magnetic flux density. The comparison of results between the values measured by experiment and the values calculated by the SAM has shown correctness and effectiveness of this method. The SAM cannot only accurately describe the distribution of magnetic flux density and optimize magnetic field in unbalanced magnetron sputtering system, but also be conveniently used for the simulation about plasma distribution and thin film growth. (C) 2009 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1317 / 1320
页数：4
相关论文
共 50 条
  • [1] The research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputtering
    Han Liang
    Zhao Yu-Qing
    Zhang Hai-Bo
    ACTA PHYSICA SINICA, 2008, 57 (02) : 996 - 1000
  • [2] Research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputtering
    Han, Liang
    Zhao, Yu-Qing
    Zhang, Hai-Bo
    Wuli Xuebao/Acta Physica Sinica, 2008, 57 (02): : 996 - 1000
  • [3] A semi-analytical method for analyzing the tunnel water inflow
    Hwang, Jin-Hung
    Lu, Chih-Chieh
    TUNNELLING AND UNDERGROUND SPACE TECHNOLOGY, 2007, 22 (01) : 39 - 46
  • [4] A　SMALL　UNBALANCED　MAGNETRON　SPUTTERING　SOURCE　WITH　MULTIPOLE　MAGNETIC　FIELD　ANODE
    郑思孝
    孙官清
    廖小东
    NuclearScienceandTechniques, 1994, (02) : 113 - 115
  • [5] New semi-analytical method for fast transcranial ultrasonic field simulation
    Angla, C.
    Chouh, H.
    Mondou, P.
    Toullelan, G.
    Perlin, K.
    Brulon, V
    De Schlichting, E.
    Larrat, B.
    Gennisson, J-L
    Chatillon, S.
    PHYSICS IN MEDICINE AND BIOLOGY, 2024, 69 (09):
  • [6] Analyze the multi-wire magnetic field of HGMS by semi-analytical method
    Yuan, Mei
    Peng, Huiqing
    Chen, Luzheng
    Lei, Yun
    RESULTS IN PHYSICS, 2018, 11 : 956 - 963
  • [7] A Fast, Semi-Analytical Method for Field Computation in Presence of Magnetic and Conductive Materials
    Formisano, A.
    Martone, R.
    2016 IEEE CONFERENCE ON ELECTROMAGNETIC FIELD COMPUTATION (CEFC), 2016,
  • [8] New DLC coating method using magnetron plasma in an unbalanced magnetic field
    Fujimaki, S
    Kashiwase, H
    Kokaku, Y
    VACUUM, 2000, 59 (2-3) : 657 - 664
  • [9] A SMALL UNBALANCED MAGNETRON SPUTTERING SOURCE WITH MULTIPOLE MAGNETIC-FIELD ANODE
    ZHENG, SX
    SUN, GQ
    WANG, PL
    LIAO, XD
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1331 - 1333
  • [10] Electrostatic field in electrorheological fluids: A semi-analytical method
    Li, XT
    Ma, HR
    ACTA PHYSICA SINICA, 2000, 49 (06) : 1070 - 1075
12345