From self-organized masks to nanotips:: A new concept for the preparation of densely packed arrays of diamond field emitters

被引:20
|
作者
Weigl, Frank [1 ]
Fricker, Sebastian
Boyen, Hans-Gerd
Dietrich, Christof
Koslowski, Berndt
Plettl, Alfred
Pursche, Oliver
Ziemann, Paul
Walther, Paul
Hartmann, Christoph
Ott, Marcel
Moeller, Martin
机构
[1] Univ Ulm, Abt Festkorperphys, D-89069 Ulm, Germany
[2] Univ Ulm, ZE Elektronenmikroskopie, D-89069 Ulm, Germany
关键词
diamond crystal; etching; field emission; nanotechnology; BLOCK-COPOLYMERS; FABRICATION; FILMS;
D O I
10.1016/j.diamond.2006.02.007
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diblock copolymer based gold nanoparticle arrays are used to pattern diamond and silicon surfaces on the nanoscale. Taking advantage of diblock copolymers forming spherical reverse micelles, which self-assemble into hexagonally ordered arrays when deposited onto a surface, gold nanoparticle patterns are prepared from HAuCl4 loaded poly(styrene)-block-poly(2-vinylpyridine) (PS-b-P2VP) micelles on top of diamond and silicon. By applying these particles as nanomasks for subsequent reactive ion etching, the hexagonal pattern is transferred into the substrate resulting in a corresponding array of diamond nanotips and silicon nanopillars, respectively. In the case of B-doped diamond, these nanotips exhibit a significantly enhanced electron emissivity as compared to a polished surface proving the new functionality resulting from nanopatterning field emitters of an unprecedented areal density. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:1689 / 1694
页数:6
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