A Polarization-Independent Zig-Zag-Tilted Ovals Grating Coupler in a 0.25μm Photonic BiCMOS Technology

被引:0
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作者
Georgieva, Galina [1 ,2 ]
Seiler, Pascal M. [1 ,2 ,3 ]
Mai, Christian [3 ]
Peczek, Anna [3 ]
Petermann, Klaus [1 ,2 ]
Zimmermann, Lars [1 ,2 ,3 ]
机构
[1] Tech Univ Berlin, Dept Hochfrequenztech Photon, Off HFT4,Einsteinufer 25, D-10587 Berlin, Germany
[2] Tech Univ Berlin, Dept Siliziumphoton, Off HFT4,Einsteinufer 25, D-10587 Berlin, Germany
[3] IHP Leibnitz Inst Innovat Mikroelekt, Technol Pk 25, D-15236 Frankfurt, Oder, Germany
关键词
SILICON;
D O I
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中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A polarization-independent grating coupler, optimized for a low in-plane scattering and PDL is presented. It comprises an array of ovals with zig-zag orientations and is compatible with a 0.25 mu m photonic BiCMOS technology. The wafer-averaged maximal PDL within a 20 nm bandwidth is 0.5 dB. (C) 2022 The Author(s)
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页数:4
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