共 2 条
A Polarization-Independent Zig-Zag-Tilted Ovals Grating Coupler in a 0.25μm Photonic BiCMOS Technology
被引:0
|作者:
Georgieva, Galina
[1
,2
]
Seiler, Pascal M.
[1
,2
,3
]
Mai, Christian
[3
]
Peczek, Anna
[3
]
Petermann, Klaus
[1
,2
]
Zimmermann, Lars
[1
,2
,3
]
机构:
[1] Tech Univ Berlin, Dept Hochfrequenztech Photon, Off HFT4,Einsteinufer 25, D-10587 Berlin, Germany
[2] Tech Univ Berlin, Dept Siliziumphoton, Off HFT4,Einsteinufer 25, D-10587 Berlin, Germany
[3] IHP Leibnitz Inst Innovat Mikroelekt, Technol Pk 25, D-15236 Frankfurt, Oder, Germany
关键词:
SILICON;
D O I:
暂无
中图分类号:
O43 [光学];
学科分类号:
070207 ;
0803 ;
摘要:
A polarization-independent grating coupler, optimized for a low in-plane scattering and PDL is presented. It comprises an array of ovals with zig-zag orientations and is compatible with a 0.25 mu m photonic BiCMOS technology. The wafer-averaged maximal PDL within a 20 nm bandwidth is 0.5 dB. (C) 2022 The Author(s)
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