Fabrication of CVD diamond photoconductive detectors

被引:1
|
作者
Marinelli, M
Milani, E
Paoletti, A
Tucciarone, A
Rinati, GV
机构
[1] Univ Roma Tor Vergata, INFM, I-00133 Rome, Italy
[2] Univ Roma Tor Vergata, Dipartimento Sci & Tecnol Fis & Energet, I-00133 Rome, Italy
关键词
D O I
10.1007/s005420050178
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present an investigation on the fabrication of synthetic diamond based photon detectors. These devices are made by depositing small gap interdigitated contacts on polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapour Deposition. Gold interdigitated contacts were deposited on the typically rough surface of these films by using both wet etching and unconventional lift-off lithographic precesses. These detectors were tested through X-ray irradiation in order to compare their potentialities in obtaining higher performance diamond photoconductive detectors. A better resolution was observed in samples obtained through the lift-off process. In particular for these samples the gap between electrodes could be kept very small and of the order of the grain size, giving higher response due the lower contribution of grain boundary effects.
引用
收藏
页码:73 / 76
页数:4
相关论文
共 50 条
  • [1] Fabrication of CVD diamond photoconductive detectors
    M. Marinelli
    E. Milani
    A. Paoletti
    A. Tucciarone
    G. V. Rinati
    Microsystem Technologies, 1999, 6 : 73 - 76
  • [2] CVD diamond photoconductive devices
    Choi, BK
    Kang, WP
    Davidson, JL
    Howell, M
    Schrimpf, RD
    Fleetwood, DM
    DIAMOND AND RELATED MATERIALS, 2004, 13 (4-8) : 785 - 790
  • [3] Optimisation of the growth parameters for the fabrication of CVD diamond radiation detectors
    Jany, C
    Bergonzo, P
    Foulon, F
    PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON DIAMOND MATERIALS, 1998, 97 (32): : 208 - 216
  • [4] Design, fabrication and testing of CVD diamond detectors with high performance
    Liu, Jiawei
    Chang, Jiafeng
    Zhang, Jizong
    Zhong, Guoqiang
    Liu, Xionghui
    Pang, Xiankai
    Jia, Junji
    AIP ADVANCES, 2019, 9 (04)
  • [5] CVD diamond detectors
    Manfredotti, C
    Polesello, P
    Truccato, M
    Vittone, E
    Lo Giudice, A
    Fizzotti, F
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1998, 410 (01): : 96 - 99
  • [6] CVD diamond detectors
    Manfredotti, C.
    Polesello, P.
    Truccato, M.
    Vittone, E.
    Lo Giudice, A.
    Fizzotti, F.
    Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1998, 410 (01): : 96 - 99
  • [7] CVD diamond particle detectors
    Mainwood, A
    DIAMOND AND RELATED MATERIALS, 1998, 7 (2-5) : 504 - 509
  • [8] Photoconductive and photovoltaic properties of CVD diamond films
    Polyakov, VI
    Rukovishnikov, AI
    Rossukanyi, NM
    Ralchenko, VG
    Spaziani, F
    Conte, G
    DIAMOND AND RELATED MATERIALS, 2005, 14 (3-7) : 594 - 597
  • [9] The fabrication and performance of CVD diamond-based X-ray detectors
    Wang, SG
    Sellin, PJ
    Zhang, Q
    Lu, FX
    Tang, WZ
    Lohstroh, A
    PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5, 2005, 475-479 : 3605 - 3609
  • [10] Photoconductive gain in single crystal diamond detectors
    Gruenwald, Theodor
    Schreck, Matthias
    JOURNAL OF APPLIED PHYSICS, 2021, 129 (12)