Barium strontium titanate thin films by metallo organic solution deposition technique for DRAM applications

被引：0
|
作者：
Joshi, PC [1 ]
Tandon, RP [1 ]
Mansingh, A [1 ]
机构：
[1] NATL PHYS LAB,NEW DELHI 110012,INDIA
来源：
FERROELECTRICS | 1997年 / 197卷 / 1-4期
关键词：
Number:; -; Acronym:; PSU; Sponsor: Pennsylvania State University;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Barium strontium titanate thin films were fabricated by metallo-organic solution deposition (MOSD) technique using acetate precursors. The films were characterized in terms of structural, electrical, and interfacial properties.
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收藏
页码：775 / 779
页数：5
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