Collisionless heating of electrons by meandering chaos and its application to a low-pressure plasma source

被引:22
|
作者
Asakura, H [1 ]
Takemura, K [1 ]
Yoshida, Z [1 ]
Uchida, T [1 ]
机构
[1] ULVAC JAPAN LTD,CHIGASAKI,KANAGAWA 253,JAPAN
关键词
magnetic neutral line; chaos; plasma production; collisionless heating; entropy production;
D O I
10.1143/JJAP.36.4493
中图分类号
O59 [应用物理学];
学科分类号
摘要
Near a magnetic neutral line, where the magnetic field vanishes, the adiabatic invariants of charged particle motion are destroyed, and hence the number of degrees of freedom increases. When a radio-frequency electric field is applied to the system, the particle motion becomes strongly chaotic. This effect can be used to produce heat in a plasma in the absence of any collisional process. The kinetic entropy of an electron orbit increases very rapidly by the mixing effect. The velocity distribution is approximated by a Gaussian function, so the thermodynamic entropy production can also be estimated. This collisionless beating mechanism enables high-efficiency plasma production at a low gas pressure.
引用
收藏
页码:4493 / 4496
页数:4
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