Lithium Storage Performance of MoS2 Thin Films Deposited by RF Magnetron Sputtering

MoS2 thin films were deposited on Cu foam substrate by radio-frequency (RF) magnetron sputtering in Ar-H2S mixed atmosphere. XRD, SEM, EDS and Raman spectroscopy were used to characterize the structure, morphology and composition of the MoS2 thin films. The effects of target power and substrate temperature on MoS2 thin films were discussed. The results show that the crystallinity of MoS2 thin films was improved with the increasing of target power and substrate temperature, and the morphology change of MoS2 thin films to worm-like nanowires. Worm-like MoS2 thin films with fine crystallization were synthesized under the target power of 80 W and substrate temperature of 300 degrees C. The electrochemical test results show that the initial discharge specific capacities of worm-like MoS2 thin films reach 980 mAh.g(-1), at the current density of 100 mA.g(-1). After 40 cycles, the discharge specific capacities were maintained at about 920 mAh.g(-1), with the capacity retention efficiency of 93.9%.