共 50 条
- [1] Uncertainty estimation for multiposition form error metrology [J]. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1997, 21 (2-3): : 72 - 82
- [2] Estimation of uncertainty in feature-based metrology [J]. ISMTII'2001: PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS, 2001, : 47 - 52
- [5] Uncertainty estimation of length measurements with instruments of legal and special metrology [J]. STROJARSTVO, 2003, 45 (4-6): : 141 - 147
- [6] The estimation of total measurement uncertainty in a multiple metrology tool environment [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVIII, PTS 1 AND 2, 2004, 5375 : 413 - 425
- [7] Uncertainty Estimation for Performance Evaluation of a Confocal Microscope as Metrology Equipment [J]. MAPAN, 2014, 29 : 29 - 42
- [8] Uncertainty Estimation for Performance Evaluation of a Confocal Microscope as Metrology Equipment [J]. MAPAN-JOURNAL OF METROLOGY SOCIETY OF INDIA, 2014, 29 (01): : 29 - 42
- [9] Uncertainty estimation in form error evaluation of freeform surfaces for precision metrology [J]. SEVENTH INTERNATIONAL SYMPOSIUM ON PRECISION MECHANICAL MEASUREMENTS, 2016, 9903