Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching

被引：0
|
作者：
Pan, YZ [1 ]
Ning, YQ [1 ]
Qin, L [1 ]
Suo, H [1 ]
Liu, Y [1 ]
Wang, LJ [1 ]
机构：
[1] Chinese Acad Sci, Lab Excited States Proc, Changchun 130021, Peoples R China
来源：
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES | 2001年 / 4601卷
关键词：
microcavity; microcylinder; lasers;
D O I：
10.1117/12.444735
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The semiconductor microcylinder lasers with whispering-gallery modes are expected to be with excellent perfomances, such as low threshold current density and high efficiency. The spontaneous emission characteristics of microcylinder laser due to microcavity effect is strongly modified. Another excellence of whispering-gallery mode devices is that the probability of planar integration with waveguide devices and detectors. In this work InGaAs/InGaAsP microcylinder laser was fabricated by wet chemical etching. The diameter of the microcylinder is about 10 mum or 5 mum. With our improved processing the microcylinder was with smooth side wall, ensuring high Q-factor. The lasing at about 1.5 mum was observed at low temperature.
引用
收藏
页码：360 / 362
页数：3
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