Separate measurement of geometrical thickness and refractive index by an interference confocal microscope

被引：0
|
作者：
Fukano, T [1 ]
Yamaguchi, I [1 ]
机构：
[1] RIKEN, Inst Phys & Chem Res, Opt Engn Lab, Wako, Saitama 3510198, Japan
来源：
ADVANCED PHOTONIC SENSORS AND APPLICATIONS | 1999年 / 3897卷
关键词：
interferometry; microscopy; thickness measurement; refractive index measurement; wavelength tuning;
D O I：
10.1117/12.369325
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we first survey non-contacting and separate measurement of thickness and refractive index of a transparent plate or film. Then we describe the separate measurement of refractive index and geometrical thickness of multiple layers which uses a combination of confocal microscopy and low-coherence interferometry. The measurement has been accelerated by replacing the low-coherence interferometry by wavelength-scanning heterodyne interferometry using a laser diode. Finally, accuracy of the measurement has been experimentally studied and display of a cross-sectional image of a stack of glass plates has been demonstrated.
引用
收藏
页码：342 / 354
页数：3
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