Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices

被引：25

作者：

Masood, Adil ^{[1
]}

Pantouvaki, Marianna ^{[2
]}

Goossens, Danny ^{[2
]}

Lepage, Guy ^{[2
]}

Verheyen, Peter ^{[2
]}

Van Campenhout, Joris ^{[2
]}

Absil, Philippe ^{[2
]}

Van Thourhout, Dries ^{[1
]}

Bogaerts, Wim ^{[1
]}

机构：

[1] Univ Ghent, IMEC, Dept Informat Technol, Photon Res Grp INTEC,Ctr Nano & Biopoton NB Photo, B-9000 Ghent, Belgium

[2] IMEC VZW, B-3001 Louvain, Belgium

来源：

OPTICAL MATERIALS EXPRESS | 2014年 / 4卷 / 07期

关键词：

D O I：

10.1364/OME.4.001383

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present fabrication and characterization of tungsten (W) heaters for thermo-optic tuning on silicon-on-insulator (SOI). The wafer-scale fabrication of these thermal tuners was done using standard complementary metal-oxide-semiconductor (CMOS) back-end fabrication materials and processes. Static and transient characterizations of heaters are presented. (C)2014 Optical Society of America

引用

页码：1383 / 1388

页数：6

共 19 条

[1] Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices
Van Campenhout, Joris
Green, William M. J.
Assefa, Solomon
Vlasov, Yurii A.
[J]. OPTICS LETTERS, 2010, 35 (07) : 1013 - 1015
[2] Development of CMOS-compatible integrated silicon photonics devices
Izhaky, Nahum
Morse, Michael T.
Koehl, Sean
Cohen, Oded
Rubin, Doron
Barkai, Assia
Sarid, Gadi
Cohen, Rami
Paniccia, Mario J.
[J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2006, 12 (06) : 1688 - 1698
[3] Fabrication of Silicon photonic circuits with integrated thermo-optic heaters for education
Deenadayalan, Venkatesh
Thomas, Paul
Preble, Stefan
[J]. 2019 30TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2019,
[4] CMOS-Compatible Fabrication, Micromachining, and Bonding Strategies for Silicon Photonics
Heck, John
Jones, Richard
Paniccia, Mario J.
[J]. ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS IV, 2011, 7927
[5] Nanostructured Silicon Photonics Devices Fabricated by CMOS-Compatible Process
Baba, Toshihiko
[J]. 2012 PHOTONICS GLOBAL CONFERENCE (PGC), 2012,
[6] Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths
Romero-Garcia, Sebastian
Merget, Florian
Zhong, Frank
Finkelstein, Hod
Witzens, Jeremy
[J]. OPTICS EXPRESS, 2013, 21 (12): : 14036 - 14046
[7] Ultra-compact silicon photonics switch with high-density thermo-optic heaters
Konoike, Ryotaro
Suzuki, Keijiro
Namiki, Shu
Kawashima, Hitoshi
Ikeda, Kazuhiro
[J]. OPTICS EXPRESS, 2019, 27 (07): : 10332 - 10342
[8] Embedded Silicon Nanoparticles as Enabler of a Novel CMOS-Compatible Fully Integrated Silicon Photonics Platform
Gonzalez-Fernandez, Alfredo A.
Aceves-Mijares, Mariano
Perez-Diaz, Oscar
Hernandez-Betanzos, Joaquin
Dominguez, Carlos
[J]. CRYSTALS, 2021, 11 (06):
[9] Monolithically integrated erbium-doped tunable laser on a CMOS-compatible silicon photonics platform
Li, Nanxi
Vermeulen, Diedrik
Su, Zhan
Magden, Emir Salih
Xin, Ming
Singh, Neetesh
Ruocco, Alfonso
Notaros, Jelena
Poulton, Christopher V.
Timurdogan, Erman
Baiocco, Christopher
Watts, Michael R.
[J]. OPTICS EXPRESS, 2018, 26 (13): : 16200 - 16211
[10] Passive devices at 2 μm wavelength on 200 mm CMOS-compatible silicon photonics platform [Invited]
Ma, Hui
Yang, Haotian
Tang, Bo
Wei, Maoliang
Li, Junying
Wu, Jianghong
Zhang, Peng
Sun, Chunlei
Li, Lan
Lin, Hongtao
[J]. CHINESE OPTICS LETTERS, 2021, 19 (07)

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