Microstructuring of silicon by electro-discharge machining (EDM) .2. applications

Micro electro-discharge machining (EDM) is introduced as a new technique to produce microstructures. The main advantages of micro-EDM are its low installation cost, high accuracy and large design freedom, Micro-EDM can indeed easily machine complex three-dimensional shapes that prove difficult for etching techniques, The primary applications of micro-EDM are in rapid prototyping and products with small batch sizes. However, the technique is versatile enough to be adapted to large series, Several examples are given of the possibilities of micro-EDM: an elastic force motor, micromirrors, an acceleration sensor and a microspring. Also the machine on which these structures were made is introduced. EDM requires electrodes as a tool. A reliable method for producing these electrodes, with custom shape and small sizes, is also presented.