Radial profile of the electron energy distribution function in RF capacitive gas-discharge plasma

被引：0

作者：

Dimitrova, M. ^{[1
]}

Popov, Tsv ^{[2
]}

Puac, N. ^{[3
]}

Skoro, N. ^{[3
]}

Spasic, K. ^{[3
]}

Malovic, G. ^{[3
]}

Dias, F. M. ^{[4
]}

Petrovic, Z. Lj ^{[3
]}

机构：

[1] Bulgarian Acad Sci, Acad E Djakov Inst Elect, 72 Tzarigradsko Chaussee, Sofia 1784, Bulgaria

[2] St Kl Ohridski Univ Sofia, Fac Phys, 5 J Bourchier Blvd, Sofia 1164, Bulgaria

[3] Univ Belgrade, Inst Phys, 118 Pregrevica, Belgrade 11080, Serbia

[4] Univ Lisbon, Inst Super Tecn, Inst Plasmas & Fusao Nucl, P-1049001 Lisbon, Portugal

来源：

19TH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES (VEIT2015) | 2016年 / 700卷

关键词：

D O I：

10.1088/1742-6596/700/1/012007

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper reports experimental results on low-pressure argon capacitive RF discharge (parallel-plate capacitively-coupled plasma - CCP) under different conditions, namely, gas pressure in the range 3 divided by 30 Pa and RF power in the range 10 divided by 100 W. The IV characteristics measured were processed by two different second-derivative probe techniques for determination of the plasma parameters and the electron energy distribution function. The radial profiles of the main plasma parameters are presented.

引用

页数：5

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