AFM based anodic oxidation and its application to oxidative cutting and welding of CNT

被引：6
|
作者：
Jiao NianDong [1 ]
Wang YueChao [1 ]
Xi Ning [2 ]
Dong ZaiLi [1 ]
机构：
[1] Chinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
[2] Michigan State Univ, Dept Elect & Comp Engn, E Lansing, MI 48824 USA
来源：
SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES | 2009年 / 52卷 / 11期
基金：
中国国家自然科学基金;
关键词：
anodic oxidation; atomic force microscope; nanofabrication; cutting and welding; carbon nanotube; ATOMIC-FORCE MICROSCOPY; SILICON SURFACES; LOCAL OXIDATION; FABRICATION;
D O I：
10.1007/s11431-009-0154-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Probe anodic oxidation by atomic force microscope (AFM) is one of the most important techniques in fabricating nano structures and devices. The technique was further studied in this paper. By analyzing the distribution of the electric field on substrate surface the dependence of oxide characters on field was discussed. The impacts of various parameters on oxide fabrication were experimentally studied. Based on these studies, we realized the oxidative cutting and welding of carbon nanotube (CNT) by the AFM based oxidation technique and provided a novel technique for the assembly and fabrication of CNT based nano devices.
引用
收藏
页码：3149 / 3157
页数：9
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