Verification of non-contacting surface electric potential measurement model using contacting electrostatic voltmeter

被引:9
|
作者
Pandey, Apra [2 ]
Kieres, Jerzy [2 ]
Noras, Maciej A. [1 ]
机构
[1] Univ N Carolina, Dept Engn Technol, Charlotte, NC 28223 USA
[2] Trek Inc, Medina, NY 14103 USA
关键词
Surface charge measurements; Input impedance; Electrostatic voltmeter;
D O I
10.1016/j.elstat.2009.01.053
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Measurements of surface charge and potential became very common in industrial applications and academic research. In this paper authors present use of a contacting ultra-high input impedance voltmeter in the areas where traditionally the non-contacting measurement methods were used. With very low input capacitance of the order of 10(-15) F, and very high input resistance of the order of tens of teraohms, there is practically no charge transfer from the measured object to or from the instrument. Experiment presented in this paper explains a correlation between the non-contacting and contacting measurement techniques using a finite element analysis model. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:453 / 456
页数:4
相关论文
共 50 条
  • [1] Non-contacting electrostatic voltmeter for wafer potential monitoring
    Noras, Maciej A.
    Maryniak, William A.
    [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXI, PTS 1-3, 2007, 6518
  • [2] Applications of non-contacting surface measurement in micromechanics
    Brown, AJC
    [J]. THREE-DIMENSIONAL AND UNCONVENTIONAL IMAGING FOR INDUSTRIAL INSPECTION AND METROLOGY, 1996, 2599 : 26 - 32
  • [3] Non-contacting stress measurement
    Dover, WD
    Zhou, J
    [J]. INSIGHT, 1998, 40 (05) : 340 - 343
  • [4] Non-contacting excitation and measurement of structures
    Amraoui, MY
    Lieven, NAJ
    [J]. FOURTH INTERNATIONAL CONFERENCE ON VIBRATION MEASUREMENTS BY LASER TECHNIQUES: ADVANCES AND APPLICATIONS, 2000, 4072 : 488 - 499
  • [5] PRECISE POSITIONING OF ELECTROSTATIC MEMS: A NON-CONTACTING APPROACH
    Wickramasinghe, I. P. M.
    Sivakumar, Ganapathy S.
    Berg, Jordan M.
    Dallas, Timothy E. J.
    [J]. PROCEEDINGS OF THE ASME DYNAMIC SYSTEMS AND CONTROL CONFERENCE 2009, PTS A AND B, 2010, : 795 - 802
  • [6] Non-contacting tension measurement for molten films
    Bian, BG
    Co, A
    [J]. POLYMER ENGINEERING AND SCIENCE, 1999, 39 (05): : 841 - 848
  • [7] BASIS FOR NON-CONTACTING LAYER THICKNESS MEASUREMENT
    KOPINECK, HJ
    [J]. STAHL UND EISEN, 1974, 94 (17): : 818 - 821
  • [8] NON-CONTACTING MEASUREMENT OF CONFORMAL COATING THICKNESS
    MAY, JT
    [J]. PROCEEDING OF THE TECHNICAL PROGRAM OF NEPCON WEST 89, VOLS 1 AND 2, 1989, : 1721 - 1729
  • [9] SHOCK MEASUREMENT WITH NON-CONTACTING FIBER OPTIC LEVERS
    COOK, RO
    HAMM, CW
    AKAY, A
    [J]. JOURNAL OF SOUND AND VIBRATION, 1981, 76 (03) : 443 - 456
  • [10] StressProbe -: A new non-contacting stress measurement technique
    Dover, WD
    Karé, RF
    Brennan, FP
    [J]. STRAIN, 2005, 41 (04) : 185 - 192