ON THE EFFECTS OF SURFACE FORCES ON THE CONTACT OF A WAFER AND ABRASIVE PARTICLES IN CMP

被引：0
|
作者：
Bozkaya, Dincer [1 ]
Mueftue, Sinan [1 ]
机构：
[1] Northeastern Univ, Dept Mech Engn, Boston, MA 02115 USA
来源：
PROCEEDINGS OF THE STLE/ASME INTERNATIONAL JOINT TRIBOLOGY CONFERENCE 2008 | 2009年
关键词：
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
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页码：557 / 559
页数：3
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