Optimization of MEMS Type Pressure Sensor with Pressure Range 0 to 1.1 Bar

被引：0

作者：

Sharma, Shivam ^{[1
]}

Chandan, Swet ^{[1
]}

Johri, Prashant ^{[2
]}

Sahi, Yashwardhan ^{[1
]}

机构：

[1] Galgotias Univ, Sch Mech Engn, Greater Noida, India

[2] Galgotias Univ, Sch Comp Sci & Engn, Greater Noida, India

来源：

2020 INTERNATIONAL CONFERENCE ON COMPUTATIONAL PERFORMANCE EVALUATION (COMPE-2020) | 2020年

关键词：

MEMS; FEA; Piezoresistive; Sensitivity;

D O I：

暂无

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

As the change in technology with regular updation and upgradation deals in making system more compact and highly sensitive in terms of MEMS based pressure sensor which leads to build a highly optimize, sustainable and high response system. In this paper, the main objective is to get higher sensitivity with the given range of pressure. The range of the pressure will be in range 0 to 1.1 bar. Main focus on the structure which will be compared and piezoresistive shapes. Here, shapes of piezoresistors are rectangle, pentagon and hexagon from which one will be selected according to highest sensitivity. The placement of piezoresistors also been considered as an important factor.

引用

页码：82 / 86

页数：5

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