Chemical-Mechanical Polishing of CdTe and Zn x Cd1-x Te Single Crystals by H2O2(HNO3)-HBr-Organic Solvent Etchant Compositions

被引：3

作者：

Tomashik, Z. F. ^{[1
]}

Tomashik, V. M. ^{[1
]}

Stratiychuk, I. B. ^{[1
]}

Okrepka, G. M. ^{[1
]}

Hnativ, I. I. ^{[1
]}

Moravec, P. ^{[2
]}

Hoschl, P. ^{[2
]}

Bok, J. ^{[2
]}

机构：

[1] Natl Acad Sci Ukraine, V Lashkaryov Inst Semicond Phys, UA-03028 Kiev, Ukraine

[2] Charles Univ Prague, Fac Math & Phys, Inst Phys, CZ-12116 Prague 2, Czech Republic

来源：

JOURNAL OF ELECTRONIC MATERIALS | 2009年 / 38卷 / 08期

关键词：

CdTe; ZnxCd1-xTe; chemical-mechanical polishing; chemical etching;

D O I：

10.1007/s11664-009-0692-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Chemical-mechanical polishing of CdTe and Zn (x) Cd1-x Te single-crystal surfaces by bromine-evolving compositions based on aqueous solutions of H2O2(HNO3)-HBr-solvent has been investigated. The dependences of the chemical-mechanical polishing rate on the dilution of the base polishing etchant for various organic components have been determined. The surface condition after such polishing has been investigated using profilometry. The polishing etchant compositions for CdTe and Zn (x) Cd1-x Te single-crystal surfaces and the chemical polishing conditions have been optimized.

引用

页码：1637 / 1644

页数：8

共 11 条

[1] Chemical–Mechanical Polishing of CdTe and ZnxCd1−xTe Single Crystals by H2O2(HNO3)–HBr–Organic Solvent Etchant Compositions
Z. F. Tomashik
V. M. Tomashik
I. B. Stratiychuk
G. M. Okrepka
I. I. Hnativ
P. Moravec
P. Höschl
J. Bok
Journal of Electronic Materials, 2009, 38 : 1637 - 1644
[2] Formation of nanosized relief on PbTe and Pb1-xSnxTe substrates surface during nonabrasive chemical-mechanical polishing by (H2O2 + HBr + ethylene glycol)/glycerol etchant compositions
Malanych, G. P.
Tomashyk, V. M.
Korchovyi, A. A.
APPLIED NANOSCIENCE, 2020, 10 (12) : 4637 - 4643
[3] Chemical interaction of CdTe and Cd1−xZnx single crystals with aqueous H2O2 + HBr + Citric acid solutions
Z. F. Tomashik
I. I. Gnativ
V. N. Tomashik
I. B. Stratiichuk
Russian Journal of Inorganic Chemistry, 2007, 52 : 1156 - 1160
[4] Chemical-mechanical polishing of CdTe, ZnxCd1-xTe and CdxHg1-xTe single crystal surfaces by K2Cr2O7-HBr-solvent etchants
Chayka, M., V
Tomashyk, Z. F.
Tomashyk, V. M.
Malanych, G. P.
Korchovyi, A. A.
FUNCTIONAL MATERIALS, 2019, 26 (02): : 412 - 418
[5] Formation of nanosized relief on PbTe and Pb1−xSnxTe substrates surface during nonabrasive chemical–mechanical polishing by (H2O2 + HBr + ethylene glycol)/glycerol etchant compositions
G. P. Malanych
V. M. Tomashyk
A. A. Korchovyi
Applied Nanoscience, 2020, 10 : 4637 - 4643
[6] Use of H2O2-HBr-lactic acid etchants for chemical dissolution of PbTe and Pb1-x Sn x Te crystals
Malanych, G. P.
Tomashyk, V. N.
Stratiychuk, I. B.
Tomashyk, Z. F.
RUSSIAN JOURNAL OF INORGANIC CHEMISTRY, 2015, 60 (09) : 1143 - 1147
[7] Chemical interaction of CdTe and Cd1-xZnxTe single crystals with aqueous H2O2+HBr plus Citric acid solutions
Tomashik, Z. F.
Gnativ, I. I.
Tomashik, V. N.
Stratiichuk, I. B.
RUSSIAN JOURNAL OF INORGANIC CHEMISTRY, 2007, 52 (07) : 1156 - 1160
[8] Chemical dissolution of CdTe and Cd1-xZnxTe solid solution single crystals in bromine etchants of the H2O2-HBr-ethylene glycol system
Tomashik, Z. F.
Hnativ, I. I.
Tomashik, V. N.
Stratiychuk, I. B.
RUSSIAN JOURNAL OF INORGANIC CHEMISTRY, 2006, 51 (08) : 1320 - 1323
[9] Chemical dissolution of CdTe and Cd1-xZnxTe solid solution single crystals in bromine etchants of the H2O2-HBr-ethylene glycol system
Z. F. Tomashik
I. I. Hnativ
V. N. Tomashik
I. B. Stratiychuk
Russian Journal of Inorganic Chemistry, 2006, 51 : 1320 - 1323
[10] Growth of MxGa2/3(1-x)Cr2Se4 (M=Cd, Zn) single crystals by chemical vapour transport and their crystal structure
Okonska-Kozlowska, I
Malicka, E
Nagel, R
Lutz, HD
JOURNAL OF ALLOYS AND COMPOUNDS, 1999, 292 (1-2) : 90 - 95

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