[1] Xi An Jiao Tong Univ, Key Lab, Elect Mat Res Lab, Sch Elect Sci & Engn, Xian 710049, Peoples R China
[2] Xi An Jiao Tong Univ, Sch Elect Sci & Engn, Int Ctr Dielect Res, Xian 710049, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China
[4] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
[5] Xi An Jiao Tong Univ, Int Joint Lab Micro Nano Mfg & Measurement Techno, Xian 710049, Peoples R China
[6] Xi An Jiao Tong Univ, State Key Lab Mech Mfg Syst, Xian 710049, Peoples R China