Amorphous thin-film growth:: Theory compared with experiment

被引：71

作者：

Raible, M ^{[1
]}

Mayr, SG ^{[1
]}

Linz, SJ ^{[1
]}

Moske, M ^{[1
]}

Hänggi, P ^{[1
]}

Samwer, K ^{[1
]}

机构：

[1] Univ Augsburg, Inst Phys, D-86135 Augsburg, Germany

来源：

EUROPHYSICS LETTERS | 2000年 / 50卷 / 01期

关键词：

D O I：

10.1209/epl/i2000-00235-7

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Experimental results on amorphous ZrAlCu thin-film growth and the dynamics of the surface morphology as predicted from a minimal nonlinear stochastic deposition equation are analysed and compared. Key points of this study are: i) an estimation procedure for coefficients entering into the growth equation and ii) a detailed analysis and interpretation of the time evolution of the correlation length and the surface roughness. The results corroborate the usefulness of the deposition equation as a tool for studying amorphous growth processes.

引用

页码：61 / 67

页数：7

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