Structural and optical properties of nearly stress-free m-plane ZnO film on (100) γ-LiAlO2 with a GaN buffer layer by metal-organic chemical vapor deposition

被引:6
|
作者
Lin, Hui [1 ,2 ]
Zhou, Shengming [1 ]
Teng, Hao [1 ,2 ]
Hou, Xiaorui [1 ,2 ]
Jia, Tingting [1 ,2 ]
Gu, Shulin [3 ,4 ]
Zhu, Shunming [3 ,4 ]
Xie, Zili [3 ,4 ]
Han, Ping [3 ,4 ]
Zhang, Rong [3 ,4 ]
Xu, Ke [5 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China
[3] Nanjing Univ, Key Lab Adv Photon & Elect Mat, Nanjing 210093, Peoples R China
[4] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China
[5] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215125, Peoples R China
基金
中国国家自然科学基金;
关键词
m-Plane ZnO thin film; Semiconductor compounds; Chemical vapor deposition; Residual stress; Photoluminescence spectra; GROWTH; ANISOTROPY;
D O I
10.1016/j.apsusc.2009.06.127
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
(1 0 (1) over bar 0) m-plane ZnO film was epitaxially deposited on (1 0 0) gamma-LiAlO2 by metal-organic chemical vapor deposition at 600 degrees C with a GaN buffer layer. The epitaxial relationships between ZnO and GaN, GaN and (1 0 0) gamma-LiAlO2 were determined by X-ray diffraction Phi-scans. There exhibits very small decrease for the E-2 mode shift (0.3 cm (1)) of ZnO in the Raman spectrum, which indicates the epitaxial ZnO film was under a slight tensile stress (5.77 x 10(7) Pa). Unlike the highly strained a-plane ZnO, temperature dependent photoluminescence spectra show that the free A exiton emission was observed with the temperature <= 138 K. (C) 2009 Elsevier B. V. All rights reserved.
引用
收藏
页码:9146 / 9148
页数:3
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