Grain sizes and surface roughness in platinum and gold thin films

被引:31
|
作者
Melo, LL [1 ]
Vaz, AR [1 ]
Salvadori, MC [1 ]
Cattani, M [1 ]
机构
[1] Univ Sao Paulo, Inst Fis, BR-05315970 Sao Paulo, Brazil
关键词
gold; grain size; platinum; roughness; thin films;
D O I
10.4028/www.scientific.net/JMNM.20-21.623
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have used silicon and glass as substrate for gold and platinum thin films deposition. The film thickness are between 40 and 440 nm for gold and between 26 and 220 nm for platinum. We have analyzed these samples by scanning tunneling microscopy and by X ray diffraction. The crystallographic and morphological grain sizes are discussed.
引用
收藏
页码:623 / 628
页数:6
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