Nonlinear calibrating for phase-shifting adapter with three PZTs

被引：1
|
作者：
Zhu, Y [1 ]
Chen, JB [1 ]
Liu, H [1 ]
Zhu, RH [1 ]
Xiao, YL [1 ]
机构：
[1] Nanjing Univ Sci & Technol, Sch Elect Opt, Inst 431, Nanjing 210094, Peoples R China
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 1999年 / 23卷 / 04期
关键词：
phase-shifting adapter; piezoelectric ceramic; calibration;
D O I：
10.1002/(SICI)1098-2760(19991120)23:4<209::AID-MOP6>3.0.CO;2-3
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A method to calibrate a phase-shifting adapter with three piezoelectric ceramics is proposed in this paper to increase the testing precision of phase-shifting interferometry. The fast Fourier transform method is used to calibrate each of the PZTs, and the spatial geometry algorithm is used to calculate the stretching differences of every PZT. According to the differences and the curves of displacement versus the step of the applied voltage to each PZT, in situ calibration of the phase-shifting adapter is allowed. Experimental work shows that, after calibration by this method, the rotation of the interferometer pattern and the change of fringe distances decline to 1 degrees and 0.015 mu m. (C) 1999 John Wiley & Sons, Inc.
引用
收藏
页码：209 / 212
页数：4
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