Effect of conductivity on the electromigration-induced morphological evolution of islands with high symmetries of surface diffusional anisotropy

被引:7
|
作者
Santoki, Jay [1 ]
Mukherjee, Arnab [2 ]
Schneider, Daniel [1 ,3 ]
Nestler, Britta [1 ,3 ]
机构
[1] Karlsruhe Inst Technol KIT, Inst Appl Mat IAM CMS, Str Forum 7, D-76131 Karlsruhe, Germany
[2] Northwestern Univ, Ctr Hierarch Mat Design CHiMaD, 2205 Tech Dr, Evanston, IL 60208 USA
[3] Karlsruhe Univ Appl Sci, Inst Digital Mat Sci IDM, Moltkestr 30, D-76133 Karlsruhe, Germany
关键词
METALLIC THIN-FILMS; PHASE-FIELD; INTERMETALLIC COMPOUNDS; SHAPE EVOLUTION; INDUCED FAILURE; DYNAMICS; GROWTH; MOTION; VOIDS; SOLDER;
D O I
10.1063/5.0033228
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the electromigration-induced morphological evolution of islands (vacancies, precipitates, and homoepitaxial adatom clusters) using a phase-field method with high symmetries of surface diffusional anisotropy. The analysis emphasizes on islands migrating in the {100} and {111} planes of the face-centered-cubic crystal, which resembles fourfold and sixfold symmetries, respectively. The numerical results intend to elaborate on the role of conductivity contrast between the island and the matrix and the misorientation of the fast diffusion direction with respect to the applied electric field on the morphological evolution. Based on numerical results, a morphological diagram is constructed in the plane of misorientation angle and conductivity contrast delineating a rich variety of morphologies, which includes steady-state, time-periodic, zigzag oscillations, and island breakup. While the shape of the island is primarily dictated by the conductivity contrast, the migration modes depend on the misorientation. The various migration modes are further distinguished based on the shape of the island such as a faceted wedge or seahorse morphology, an oscillatory characteristic such as standing wave or traveling wave time-periodic oscillations, and different breakup features. The steady-state kinetics obtained from the fourfold and sixfold symmetries are critically compared with the twofold symmetry, isotropic analytical, and numerical findings. Our result suggests that the steady-state velocity decreases with the symmetry fold of the island. Furthermore, the influence of variation in conductivity contrast and misorientation on kinetics in the time-periodic oscillations are discussed. Finally, the numerically obtained stable facets are compared with the analytically derived orientations. The observed results have direct repercussions in terms of the fabrication of nanopatterns and the performance of thin-film interconnects.
引用
收藏
页数:17
相关论文
共 22 条
  • [1] Electromigration-induced flow of islands and voids on the Cu(001) surface
    Mehl, H
    Biham, O
    Millo, O
    Karimi, M
    PHYSICAL REVIEW B, 2000, 61 (07) : 4975 - 4982
  • [2] A phase field model for electromigration-induced surface evolution
    Kim, JH
    Cha, PR
    Yeon, DH
    Yoon, JK
    METALS AND MATERIALS INTERNATIONAL, 2003, 9 (03): : 279 - 286
  • [3] A theoretical analysis of the electromigration-induced void morphological evolution under high current density
    Yuexing Wang
    Yao Yao
    Acta Mechanica Sinica, 2017, 33 : 868 - 878
  • [4] A phase field model for electromigration-induced surface evolution
    Ji-Hee Kim
    Pil-Ryung Cha
    Dong-Hee Yeon
    Jong-Kyu Yoon
    Metals and Materials International, 2003, 9 : 279 - 286
  • [5] A theoretical analysis of the electromigration-induced void morphological evolution under high current density
    Yuexing Wang
    Yao Yao
    Acta Mechanica Sinica, 2017, 33 (05) : 868 - 878
  • [6] A theoretical analysis of the electromigration-induced void morphological evolution under high current density
    Wang, Yuexing
    Yao, Yao
    ACTA MECHANICA SINICA, 2017, 33 (05) : 868 - 878
  • [7] Role of conductivity on the electromigration-induced morphological evolution of inclusions in {110}-oriented single crystal metallic thin films
    Santoki, Jay
    Mukherjee, Arnab
    Schneider, Daniel
    Nestler, Britta
    JOURNAL OF APPLIED PHYSICS, 2019, 126 (16)
  • [8] Electromigration-induced surface evolution in bamboo lines with transgranular and intergranular edge voids
    Nathan, M
    Averbuch, A
    Israeli, M
    THIN SOLID FILMS, 2004, 466 (1-2) : 347 - 350
  • [9] Effect of substrate surface on electromigration-induced sliding at hetero-interfaces
    Kumar, Praveen
    Dutta, Indranath
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2013, 46 (15)
  • [10] EFFECT OF DIFFUSIVITY VARIATION ON CAPILLARITY AND ELECTROMIGRATION-INDUCED SURFACE AND GRAIN-BOUNDARY DIFFUSION
    HUANG, HL
    YANG, JS
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1987, 20 (04) : 493 - 503