Integrated optical dual Mach-Zehnder interferometer sensor

The fabrication and operation of robust integrated optical refractometers, suitable for precise measurements of small changes without ambiguity over a wide range of refractive indices, is described. The design primarily uses an optical fibre coupled dual-sensitivity integrated optical Mach-Zehnder interferometer (MZI) sensor chip incorporating 3 x 3 directional coupler combiners and internal referencing. High-index tantalum pentoxide (Ta2O5) films were deposited on the waveguide surface in order to increase sensitivity and measurements of their response to liquid analyte index have been carried out by passing aqueous sucrose solutions over the sensor surface. These devices are intended for application as high-sensitivity multi-purpose chemical sensors and bio-sensors. (C) 2002 Elsevier Science B.V. All rights reserved.