Effects of rotary inertia and shear deformation on nonlinear vibration of micromano-beam resonators

In this paper, the large amplitude free vibration of a doubly clamped microbeam is considered. The effects of shear deformation and rotary inertia on the large amplitude vibration of the microbeam are investigated. To this end, first Hamilton's principle is used in deriving the partial differential equation of the microbeam response under the mentioned conditions. Then, implementing the Galerkin's method the partial differential equation is converted to an ordinary nonlinear differential equation. Finally, the method of multiple scales is used to determine a second order perturbation solution for the obtained ODE. The results show that nonlinearity acts in the direction of increasing the natural frequency of the doubly clamped microbeam. Shear deformation and rotary inertia have significant effects on the large amplitude vibration of thick and short microbeams.