Design of MEMS Step Impedance Microstrip Filter in Ku Band

被引：0
|
作者：
Bai, Tianyu [1 ]
Yang, Guohui [1 ]
Zhang, Kuang [1 ]
Li, Yingsong [2 ,3 ]
Jiang, Tao [4 ]
机构：
[1] Harbin Inst Technol, Sch Elect & Informat Engn, Harbin, Peoples R China
[2] Anhui Prov Key Lab Target Recognit & Feature Extr, Luan 230088, Peoples R China
[3] Anhui Univ, Minist Educ, Key Lab Intelligent Comp & Signal Proc, Hefei, Peoples R China
[4] Harbin Engn Univ, Minist Ind & Informat Technol, Key Lab Adv Marine Commun & Informat Technol, Harbin, Peoples R China
来源：
2022 IEEE 10TH ASIA-PACIFIC CONFERENCE ON ANTENNAS AND PROPAGATION, APCAP | 2022年
关键词：
stepped impedance resonator; microstrip bandpass filter; MEMS;
D O I：
10.1109/APCAP56600.2022.10069073
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
According to the miniaturization characteristics of step impedance resonators, a step impedance bandpass filter with a center frequency of 16.55 GHz and a bandwidth of 500MHz is designed. The effects of parameter changes such as substrate resistivity and the shape of metal via etching on the performance of the filter are studied. Finally, the filter is fabricated and its performance is tested under MEMS technology.
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页数：5
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